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1

Rapid annealing using the water-wall arc lamp

Jeffrey C. Gelpey, Paul O. Stump

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1985

Language:

english

File:

PDF, 560 KB

english, 1985

2

Uniformity characterization of an RTP system

Jeffrey C. Gelpey, Paul O. Stump, Julian Blake, Alvin Michel, Werner Rausch

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1987

Language:

english

File:

PDF, 381 KB

english, 1987

3

Advantages of rapid optical annealing

Gelpey, Jeffrey C., Stump, Paul O., Camm, David

Journal:

Canadian Journal of Physics

Year:

1985

Language:

english

File:

PDF, 392 KB

english, 1985

4

An Overview of ms Annealing for Deep Sub-Micron Activation

Gelpey, Jeffrey C., McCoy, Steve, Camm, Dave, Lerch, Wilfried

Journal:

Materials Science Forum

Year:

2008

Language:

english

File:

PDF, 540 KB

english, 2008

5

Process-Induced Diffusion Phenomena in Advanced CMOS Technologies

Pichler, Peter, Burenkov, Alexander, Lerch, Wilfried, Lorenz, Jürgen, Paul, Silke, Niess, Jürgen, Nényei, Zsolt, Gelpey, Jeffrey C., McCoy, Steve, Windl, Wolfgang, Giles, Luis Felipe

Journal:

Defect and Diffusion Forum

Year:

2006

Language:

english

File:

PDF, 2.21 MB

english, 2006

6

Capless Rapid Thermal Annealing of Silicon Ion Implanted Gallium Arsenide

Hara, Tohru, Gelpey, Jeffrey C.

Journal:

Japanese Journal of Applied Physics

Year:

1987

File:

PDF, 496 KB

1987

7

Oxide Growth Using the Water-Wall Arc Lamp

Gelpey, Jeffrey C., Stump, Paul O., Capodilupo, Ronald A.

Journal:

MRS Proceedings

Year:

1985

Language:

english

File:

PDF, 258 KB

english, 1985

8

Process Control for a Rapid Optical Annealing System

Gelpey, Jeffrey C., Stump, Paul O., Smith, John W.

Journal:

MRS Proceedings

Year:

1985

Language:

english

File:

PDF, 510 KB

english, 1985

9

Slip Free Rapid Thermal Processing

Blake, Julian, Gelpey, Jeffrey C., Moquin, John F., Schlueter, James, Capodilupo, Ron

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 1.82 MB

english, 1987

10

Rapid Thermal Processing of Silicon Ion Implanted Channel Layers in GaAs

Hara, Tohru, Gelpey, Jeffrey C.

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 309 KB

english, 1987

11

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Rapid Isothermal Processing - Effect Of Silicon Emissivity On Temperature Measurement And Control In Rapid Thermal Processing

Crowley, John L., Liao, Jimmy C., Gelpey, Jeffrey C., Singh, Rajendra

Year:

1990

Language:

english

File:

PDF, 430 KB

english, 1990

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